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Mahr Metrology MarSurf UD 130 Aspheric 2D

MarSurf UD 130. The step into a new dimension

MarSurf UD 130 Aspheric is a very precise 2D surface measuring station for characterizing the contour and roughness of optical components.

Checking the topography in the first processing steps
  • Early detection of deviations, thus eliminating the need for time-consuming post-processing.
  • Output of the difference profile in machine-readable format for controlling the processing machine.
Increased flexibility
  • Various types of rotationally symmetrical aspheres can be measured with one measuring system. No further investments are necessary.
  • High measuring speed and dynamics (up to 5 mm/s for large lenses / up to 0.1 mm/s for micro lenses)
  • Free positioning of the probe tip.
Your results are correct
  • The high-precision MarSurf UD 130 is the basis for the precise measurement of your workpieces. The vertical resolution of 2 nm and shape deviations of < 300 nm guarantee you an exact reproduction of your asphere.
  • Changing the probe arm without recalibrating.
  • Measurement of optics with steep flanks possible.

Description

Properties of the horizonal axis X
Traversing length 0.1 up to 130 mm
Positioning speed 0.1 up to 30 mm/s
Measuring speed 0.1 up to 5 mm/s
Resolution 2 nm

 

Technical data probe system W
Probe measuring range                                100 mm probe arm 10mm
                                                                          200 mm probe arm 20mm
Positioning speed Z-direction (adjustable) 0.1 up to 5 mm/s
Probing speed Z-direction (adjustable) 0.1 up to 1 mm/s
Resolution 2 nm
Measuring force (adjustable via software) 1 up to 30 mN

 

Lens measurement*1
2D form deviation from the best-fit circle < 300 nm

 

General Data
Operating temperature + 15°C to + 35°C
Suggested working temperature 20°C ± 2 K
Max. temperature change < 0.5 K/h
Relative humidity (non-condensing) 25 % to 70 %

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Please fill in the request form below and one of our engineers will contact you to discuss your system requirements and if we can help, our typical response time is within 1 – 3 working day.