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Mahr Metrology MarSurf LD 260

Highest precision for roughness and contour with 260 mm probe section

Combined contour and roughness measurements “in one go” can be excellently solved by proven cutting-edge technology of Mahr measurement technology.
The Measuring Stations MarSurf LD 130 and MarSurf LD 260 are characterized by consistent further development and integration of the experience from the first generation.
Measuring tasks in the various applications increasingly require the combination of contour and roughness depth determinations. In order to meet these requirements, the measuring instruments must demonstrate enormous metrological performance.
Resolutions in the sub-nanometer range as well as residual noise of < 20 nm Rz are just some of the required boundary conditions.

  • Roughness and contour in one go
  • High measuring and positioning speed
    minimizes measuring times many times over
  • Innovative probe system solution
  • Fast and safe replacement of the
    probe arms with simultaneous probe arm detection
    by magnetic mount
  • Long measuring distance up to 260 mm
    with a measuring stroke of 13 mm
    (at 100mm probe arm length)
    or 26 mm (with 200 mm probe arm length)
  • Service-friendly due to modular design

Description

MarSurf LD 260 | Art.-No. 6720826
Resolution 0.8 nm
Probe arm length 100 mm; 150 mm; 200 mm
Leadership Deviation 0.10 μm / 60 mm
0.20 μm / 130 mm
0.40 μm / 260 mm
Measuring speed 0.02 mm/s to 10 mm/s
Tactile section (in X) End 260 mm
Positioning speed 0.02 mm/s to 200 mm/s
Button Combined roughness and contour probe system
Measuring range mm 13 mm (100mm probe arm)
26 mm (200mm probe arm)
Tactile distances 0.1 mm to 260 mm
Measuring force (N) 0.5 mN to 30 mN, adjustable by software

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