Description
| Properties of the horizontal axis X | |
| Traversing length | 0.1 mm up to 130 mm / 260 mm |
| Positioning speed | 0.02 mm/s up to 200 mm/s |
| Measuring speed | 0.02 mm/s to 10 mm/s
for roughness measurement recommended: 0.1 mm/s to 0.5 mm/s |
| Measuring point spacing | 0.05 μm up to 30 μm, adjustable |
| Max number of points in one scan | 2.6 million points (MarSurf LD 130) / 5.2 million points (MarSurf LD 260) |
| Resolution | 0.8 nm (0.03 μin) |
| Uncertainty X-axis display | ± (0.2+l/1000) μm; l in mm |
| System noise | < 5 nm RMS |
| Surface roughness | < 5 nm |
| Technical data probe system (Measuring direction Z+ / Z-) | |
| Probe measuring range | 13 mm
(100 mm probe arm) 26 mm (200 mm probe arm) |
| Resolution | 0.8 nm |
| Measuring force | 0.5 mN up to 30 mN (electronically adjustable) |
| High precision spindle (3D version) | |
| Radial error limit | ± (0.01 + 0.00025H) μm;
H = height above table |
| Axial error limit | ± (0.02 + 0.0001R) μm;
R = radius form center |
| Resolution | 0.00025° |
| Positioning control | < ± 0.02° |
| Accuracy precision centering | < 0.8 μm |
| Accuracy precision levelling | < 0.006° |
| Contour – display deviation | |
| Distance measurement EA | MPEEA = ± (1.0+l/150)μm,
l in mm |
| Radius measurement RK
R < 10 mm 10 mm < R < 300 mm R > 300 mm |
MPER = ± 1.0 μm MPER = ± (0.17+R/12) μm MPER = ± (-18+R/7) μm |
| Form error | ≤ 100 nm (2D)*
≤ 200 nm (3D)* |
| Slope | < ± 45° |
| Real 3D Measurement | |
| Measuring time | typically 5 to10 min |
| Point density | typically: 1 μm linear, 0.1° polar 3D: Number of polar traces + inter- polation |
| Drive unit with automatic y-axis for centering | |
| General Data | |
| Operating temperature | + 15°C to + 35°C |
| Suggested working temperature | 20°C ± 2K |
| Temperature change | < 0.5 K/h |
| Active antivibration system | |
